Empowering Innovation with Custom X-Ray and EUV Optics

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Unlock the Potential of X-Ray and EUV Optics for Your Business and Scientific Research

X-ray and EUV optics designed to meet your needs

What we create

Reflective optics

We specialize in designing and manufacturing high-precision X-ray and EUV mirrors and monochromators, a capability validated through successful collaborations with leading global industry players.

Diffractive optics

We have extensive expertise in the design and production of EUV gratings, enabling precise analysis of spectral compositions in the extreme ultraviolet range.

Transmissive optics

We fabricate highly durable free-standing silicon nitride membranes (down to 10 nm thick) in cleanroom facilities, with the capability to coat them with additional materials for electron microscopy, x-ray optics, or as a filter.

Refractive optics

We have expertise in manufacturing high-precision submicron focusing X-ray silicon refractive lenses, achieving spot sizes as small as 140 nm for advanced imaging and analytical applications.

Applications

XRF

X-ray Fluorescence: multilayer mirrors with ultra-small periods for high-sensitivity elemental analysis

X-ray & EUV filtering

Free-standing silicon nitride (SiN) membranes for selective transmission and protection

XRD

X-ray Diffraction: mirrors and monochromators for precise beam conditioning

EUV spectrometry

Diffraction gratings for high-resolution spectral measurements

Synchrotron

Synchrotron beamlines optics: focusing, imaging mirrors and multilayer monochromators for advanced research

X-ray beam shaping

Silicon refractive lenses for precise focusing and beam manipulation

Our story

Years of Experience

40+

Relevant PhD dissertations

REX-Optics was founded by experts from the Industrial Focus Group XUV Optics at the University of Twente, a renowned institution in both industry and academia for its innovative x-ray and EUV optical solutions. We are dedicated to advancing the boundaries of optics innovation and customization.

Our mission is to provide premium quality, specialized x-ray and EUV optics and components for various applications, including metrology equipment and research. We are committed to delivering cutting-edge solutions tailored to meet the unique needs of our clients.

King Willem-Alexander of the Netherlands visits the XUV Group Laboratory, home to REX-Optics, accompanied by Professor Marcelo Ackermann, founder of REX-Optics

Photo made by Eric Brinkhorst