Beta · X‑ray reflectivity · access on request

Understand your XRR data.

Fit thin films and periodic multilayers from an X-ray reflectivity scan. Describe your sample, compare the fitted curve with your data, and download a report of the results and their limitations.

By REX-Optics, University of Twente spin-off — built for the scans we fit every day.

REX Analyze fitting an X-ray reflectivity curve of an oxide bilayer on silicon Preview of the analysis view. Left: the fitted layer table — silicon dioxide 2.5 nanometres, tantalum pentoxide 31 nanometres on silicon — each value marked fitted or fixed, above a plaque reading "Fit supports this structure". Right: measured reflectivity points spanning seven decades against grazing angle, with the fitted curve through them. REX-Optics · Analyze XRR · Cu Kα · 420 points Curve CSV ⤓ Report ⤓ FITTED STRUCTURE 1. SiO2 2.2 g/cm³ fitted · interface 0.4 nm fitted 2.5 nm poorly constrained 2. Ta2O5 8.2 g/cm³ fixed · interface 0.5 nm fitted 31 nm fitted Si · substrate · 2.329 g/cm³ fixed Fit supports this structure Total film thickness 33.5 nm Conditional on the stated materials; a close fit is not a unique solution. REFLECTIVITY 110−210−410−6 00.51.0 1.52.02.5 grazing angle θ (°) Measured Selected fit synthetic example, not a measurement
Example fit to synthetic data: SiO₂ / Ta₂O₅ on Si. This illustration is not a measurement of a real sample.

HOW IT WORKS

From scan to fit

1. Upload your scan

Use an XRDML file or a data table. Preview the curve and Fourier spectrum without using an analysis credit.

2. Describe the sample

Enter the substrate and layers, or use a text description. Approximate thicknesses help; unknown details can stay unknown.

3. Review the result

See the fitted curve, the layer table and what the data could not resolve. If more information is needed, answer within the same analysis. Download the report when it is ready.

WHAT IT CAN TELL YOU

Thickness, density and interfaces

REX Analyze uses AI to choose candidate structures, ask follow-up questions and write the interpretation; the fits and the numbers in the report come from our own numerical code. It supports single films and periodic multilayers, including structures with caps and barriers.

A close fit does not always identify a unique structure. The report marks each value as fitted, fixed or poorly constrained, and does not quote ± uncertainties. In multilayers, the repeat period can be clear even when individual barrier thicknesses are not.

Which measurement details are needed?

Tables need an angle or q axis and the X-ray wavelength. XRDML files often contain these details. You do not need to know every instrument setting or interface in advance.

How does the Fourier preview help?

Peaks suggest distances between interfaces or a multilayer period. They help initialize the fit; they are not a direct picture of the layer structure. Very thin or low-contrast films may have no reliable peak.

ACCESS AND PRICE

Try it with your own data

Beta access

5 trial analyses

Available by request. Tell us what you measure and which email you would like to use.

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Analysis pack · coming later

€15 / 20 analyses

Excluding VAT. No subscription. Packs are not available to purchase yet.

Groups and labs

Let's talk

Shared allowances for a research group or a metrology lab, and questions about data handling.

Contact us

One analysis covers one scan and its follow-up questions. Preview is free. Technical failures return the credit; an inconclusive scientific result still counts. Prices are shown excluding VAT; when packs go on sale, the applicable VAT is added at checkout and consumer prices are shown including it.

YOUR DATA

Know what you are sharing

REX-Optics stores your uploaded files and reports for 30 days. Your sample description and evidence from the scan are sent to an AI provider for analysis. You can delete your files and reports sooner from your account.

Read the privacy notice · Terms of use

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